Clean Storage
Reticle Stockers
M1500 Semi-Automatic Reticle Box Stocker
The Brooks semi-automatic M1500 stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database. This optimizes the tracing of the reticles in the fab.

  • High capacity – small footprint
  • Fast load/unload
  • User-friendly GUI
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M1900 Reticle Stockers
The Brooks M1900 is a fully-automatic semi-bare stocker that stores up to 6,400 reticles in anti-static semi bare cases. Multiple load port designs for all kind of reticle boxes (i.e. SMIF, Toppan, Hoya) offer great flexibility.

  • Fully automated reticle/mask handling
  • Class 1 mini-environment/ESD/AMC
  • Reticle changer function
  • N2/XCDA purge to prevent haze growth
  • High capacity – small footprint
  • Embedded metrology tool
  • Buffer station
  • Manual back up possible
  • OHT interface
  • N2 blow off
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M1990 Fully-Automatic Bare Reticle Stocker
The Brooks M1990 is a fully-automatic bare stocker that stores up to 2,016 reticles. Reticles are stored vertically on anti-static support in an ultra-clean recirculated purged mini environment. Individual I/O stations to accommodate all types of reticle boxes.
  • Fully-automated reticle/mask handling
  • N2/XCDA purge in re-circulation mode
  • Encapsulated temperature and humidity controlled environment
  • Class 1 ISO mini-environment/ESD/AMC
  • High capacity – smallest footprint
  • OHT interface
  • N2 blow off
  • Embedded metrology tool
  • Buffer module
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M1995 Fully-Automatic Bare Compartment Reticle Stocker
M1995 is a fully-automatic compartment stocker that stores up to 2,860 reticles. Reticles are stored horizontally in compartments in an ultra-clean recirculated purged mini environment. In addition, the reticle storage compartments receive a purified gas purge. Individual I/O stations to accommodate all types of reticle boxes.

  • Fully-automated reticle/mask handling
  • N2/XCDA purge in re-circulation mode for best haze/crystal grow reduction
  • Encapsulated temperature and humidity controlled environment
  • Class 1 ISO mini-environment/ESD/AMC
  • Purge into compartment
  • Small footprint
  • OHT interface
  • N2 blow off
  • Embedded metrology tool
  • Earthquake proof compartment storage
  • Buffer module
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M2090 Reticle Changer/Stocker
M2090 Reticle Changer/Stocker is a reticle/mask exchange, inspection and stocker system. I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.). An optional storage rack can be located in the backside of the tool.

  • Fully automated reticle/mask handling
  • Class 1 mini-environment/ESD/AMC
  • Reticle storage
  • Reticle orientation
  • Reticle code identification
  • RF-tag or barcode identification of boxes
  • Bright light visual inspection
  • Embedded metrology tool
  • N2 blow off
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ZARIS™ Reticle Automation System
The ZARIS reticle automation system from Brooks reliably automates the handling of 5” and 6” reticles from a wide range of shipping and stepper cassettes. This industry-leading reticle sorter/bright light macro inspection/nitrogen cleaning system prevents the mask damage and mishandling typically encountered in manual inspection processes. By consistently presenting defect-free reticles in the proper orientation, ZARIS improves stepper utilization and reduces lithography rework for improved operational efficiency and bottom-line results.

With a proven record for reliable operation and ease of use, the ZARIS reticle automation system accelerates factory ramp while minimizing reticle and pellicle damage. ZARIS complements the Brooks suite of lithography automation systems including the industry-leading Guardian Reticle Stocker.

  • Reticle sorting, bright light inspection, and nitrogen cleaning
  • Identification of reticles and pellicles
  • Use of ESD-safe materials

Optional Features and Capabilities

  • Optical character recognition for reticle and/or pellicle ID
  • Automated particle detection
  • Pellicle mounting
  • GEM/SECS link
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Wafer Stockers
M2100 200mm Wafer Stocker

M2100 is a fully-automated 200mm wafer stocker that stores up to 2,200 wafers. Wafers are stored horizontally in compartments and managed in zones to avoid cross contamination. It provides fast access to each individual wafer and can act as a sorter.

  • Fully-automated wafer handling
  • Class 1 mini-environment/ESD/AMC
  • Wafer alignment with OCR
  • Wafer sorter function
  • Auto-teaching
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M2200 300mm Wafer Stocker

M2200 is a fully-automatic 300mm wafer stocker that stores up to 2,300 wafers. Wafers are stored vertically in compartments and managed in individual zones to avoid cross contamination. It provides fast access to each individual wafer and can act as a sorter.

  • Fully-automated wafer handling
  • ISO Class 2 mini-environment
  • ESD and AMC controlled
  • N2/XCDA purge in re-circulation mode
  • Encapsulated temperature and humidity controlled environment
  • High density 1/4 pitch storage in plastic molded compartment
  • Wafer alignment with OCR for wafer history management
  • FOUP buffer for lot preparation
  • Wafer sorter function
  • Auto-teaching
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M2400 300mm Wafer Stocker
M2400 is a fully-automatic 300mm wafer stocker that stores up to 1,200 wafers. Wafers are stored vertically in compartments and managed in individual zones to avoid cross contamination. It provides fast access to each individual wafer and can act as a sorter.
  • Fully-automated wafer handling
  • Class 0.1 mini-environment/ESD/AMC
  • N2/XCDA purge in re-circulation mode
  • High density 1/4 pitch storage in plastic molded compartment
  • Wafer alignment with OCR for wafer history management
  • Wafer sorter function
  • Auto-teaching
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