Cleaning Equipment
FOUP/Pod Cleaners
M800 300mm FOUP Cleaner
The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.

  • High pressure DI-water spraying
  • Lid and shell cleaning separated
  • Lid dry clean function
  • Vacuum decontamination for AMC compound removal
  • FOUP inspection station
  • 20 FOUP per hour throughput
  • IR drying technology
  • N2/XCDA purge for load port
  • OHT interface
  • Class 1 mini-environment
  • SEMI standard compliant SECS/GEM interface
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M330™ Fully-Automatic FOUP/Pod Cleaner
The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.

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M300 Semi-Automatic FOUP/Pod Cleaner
The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.

  • Reticle/Wafer carrier – cleaning system
  • Highest product flexibility
  • Excellent IR drying system
  • High throughput
  • Superior wash & rinse
  • Lowest CoO
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M600 Automatic Pod Cleaner
The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of FOUP, FOSB or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.

  • Fully-automated cleaning of FOUP or RSP200
  • Semi-automated cleaning of all kind reticle/wafer carrier
  • Internal buffer
  • IR drying technology
  • Manual operation possible
  • OHT interface
  • Class 1 mini-environment & ESD
  • SEMI standard compliant SECS/GEM interface
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M450 450mm FOUP/MAC Cleaner
The M450 fully-automatic 450mm FOUP/MAC cleaner combines best particle and AMC cleaning performance and provides humidity control.
  • High pressure DI-water spraying
  • Lid and shell cleaning separated
  • Lid dry clean function
  • Vacuum decontamination for AMC compound removal
  • FOUP inspection station
  • IR drying technology
  • N2/XCDA purge for load port
  • OHT interface
  • Class 1 mini-environment
  • SEMI standard compliant SECS/GEM interface
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EUV Pod Cleaner
M1000 EUV Pod Cleaner
The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.
  • High pressure DI-water spraying
  • Lid and shell cleaning separated
  • Vacuum decontamination for AMC compound removal
  • IR drying technology
  • N2/XCDA purge for load port
  • OHT interface
  • Class 1 mini-environment
  • SEMI standard compliant SECS/GEM interface
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