Water Handling Robotics

IsoPort™ I/O Port
IsoPort, the production-proven 300 mm I/O port, broke new ground in automated 300 mm wafer handling with its industry leading interoperability and flexibility. It leverages pioneering leadership in automation technology to deliver a reliable, economic, Front-Opening-Unified-Pod (FOUP) interface.

The IsoPort gives semiconductor tool equipment manufacturers a highly configurable, automated wafer-handling solution that easily integrates with any tool. In short, the IsoPort I/O port offers many advanced benefits for both equipment makers and chipmakers transitioning to 300 mm wafers.

  • Provides best-in-class interoperability performance through precise servo-controlled motion, smart latchkey design, and optimized carrier sensing.
  • Exceeds both the ergonomic and economic necessities of automation – the results of larger, heavier wafer carriers and significantly increased yield risks.
  • Optimized tool throughput reduces time from FOUP arrival to first-wafer access to just 8 seconds.
  • Best-in-class cleanliness with contamination conformance to ISO Class 1 particle level.
  • Configurable design easily integrates all types of automated carrier identification solutions (RF, infrared, or barcode).

 

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Vision™ Load Port Module
Brooks is the world’s largest semiconductor automation supplier and the inventor of LPM technology. Brooks has shipped load port modules to every semiconductor fab across the globe. Our load port modules provide ultra-clean performance and superior load port to FOUP interoperability to meet the stringent requirements of today’s semiconductor manufacturers. Brooks load port modules minimize cost and complexity by leveraging capabilities readily available in other portions of the process tool. Plus, they provide all of the necessary status and control interfaces and hardware safety interlocks to help ensure safe, efficient, and ultra-clean loading and unloading of wafers to and from the process tool.

  • 300mm and 450mm capability on one common architecture
  • Local color LCD interface for fab-specific configuration with the touch of a button
  • Kinematic mounting system for one-time height and level adjustment
  • End-of-line configurable options, including carrier ID, mapping, and E84, for reduced lead times
  • Servo motion control for reduced facilities requirement and higher reliability
  • BOLTS and FIXLOAD compatibility
  • MCBF of >500,000 cycles
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Certon™ 450 Load Port

The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards. Unique features include a patent-pending port door engaging mechanisms with synchronized and concurrent closing of Pod Door and capable of 390N of evenly distributed force.

The patented Tilt and Go feature enables installation and removal by a single person and is easily handled due to evenly distributed mass. The 450 Load Port weighs a mere 80kg – half of competing loadports.

Implementation of standard features

  • Wafer mapping, including 300mm wafers in a 450mm carrier insert
  • Protrusion sensing
  • Carrier presence sensing

Highly configurable

  • Software configurable indicator lights
  • Communications – HSMS, SECS, ASCII over RS232, ASCII over Ethernet

Ease of use

  • Integrated RFID
  • Browser configurable
  • Protocol converters to emulate previous and competing loadports

Low Cost of Ownership

  • No internal alignment means fast set up times
  • No scheduled maintenance

Best in class ergonomics

  • “Tilt and Go” for single person servicing
  • Patent-pending horizontal door closing mechanism
  • To obtain more information on this product contact your regional sales office.
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