SMIF Solutions
Atmospheric Robots
SMIF Load Port Transfer (LPT)
The SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools. The SMIF-LPT is designed for adaptive and equipment manufacturer applications for vacuum load-lock tools, which require an external lateral cassette transfer mechanism.

  • SMIF-LPT Tr is a rotational head designed for non-perpendicular cassette placement
  • SMIF-LPT Tx offers a lateral cassette motion to address narrow cassette-to-cassette spacing
  • SMIF-LPT Ty has an offset arm to accommodate narrow chamber openings
  • These features can also be combined or upgraded on an existing SMIF-LPT
  • A robust kinematic interface provides quick, accurate, and reliable mounting and removal (a hinge and latch option is available for equipment manufacturer integration).
  • Wafer sensing and reseating system prevents wafer breakage.
  • Wafer transfer is accomplished in a better than Class 1 mini-environment which ensures maximum protection from particulate contamination.
  • Fast load and unload cycle time leads industry.
  • Integrated SMART-Tag Auto ID provides lot tracking and control.
  • Installed base of over 12,000 LPT/LPI units.

Maximum Productivity & Profitability

  • A robust kinematic interface provides quick, accurate, and reliable mounting and removal (a hinge and latch option is available for equipment manufacturer integration).
  • Wafer sensing and reseating system prevents wafer breakage.
  • Wafer transfer is accomplished in a better than Class 1 mini-environment which ensures maximum protection from particulate contamination.
  • Fast load and unload cycle time leads industry.
  • Integrated SMART-Tag Auto ID provides lot tracking and control.
  • Installed base of over 12,000 LPT/LPI units.
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SMIF-INX Indexers
SMIF-INX products are designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers. With an installed base of over 15,000 units, the SMIF-INX has proven its versatility, functionality, and reliability. Contamination control benefits of the SMIF system are well documented and reveal how the latest generation INX 2200 EP provides a substantial increase in die yield for fabs. Indexers meet SEMI E15 and E19 specifications and are CE certified.
  • The internal PTFE-ULPA filtration system maintains a better than ISO Class 3 environment.
  • SMIF-INX mounts directly into the process tool.
  • DC Servo control with position feedback provides high-speed wafer indexing with minimal impact on tool cycle time ensuring positioning accuracy of ±0.005 inches (0.127mm).
  • Patented laser-based sensing system provides precision wafer and slot location, wafer position mapping, cross-slotted wafer detection, and sensing of protruding wafers and automatic reseating.
  • Quick disconnect assembly offers easy maintenance.
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VersaPort™ 2200 SMIF-Compatible Load Port

The VersaPort 2200 industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.

The Platform Mount VersaPort is ergonomically designed to easily integrate the SMIF contamination control technology for unloading and loading all 200mm SMIF-Pods™. VersaPort is also the industry’s most advanced 200mm BOLTS compliant loadport opener. It performs unloading and loading of all 200mm SMIF-Pods to 300mm class tools.

In both, a sophisticated feature set includes laser based cassette slot/wafer mapping, cross-slotted detection, wafer protrusion sensing, and automatic wafer reseating.

  • Open cassette I/O processing is available with a Manual Open Cassette Adapter (MOCA) option.
  • VersaPort’s unique “Tilt-n-Go” kinetic interface enables quick, one-person installation and easy alignment. No realignment is needed after installation.
  • SMIF contamination control technology delivers better-than-Class 1 performance per Federal Std 209-E.
  • Advanced laser based wafer detection employs a sophisticated feature set that includes laser based cassette slot/wafer mapping, cross-slotted detection, wafer protrusion sensing, and automatic wafer reseating.
  • IR based reflective sensor provides excessive wafer protrusion sensing, detects wafers beyond re-seat capability, and engages emergency stop and brake.
  • Integrated self-test diagnosis is included, and advanced diagnostic software is available for easy design-in and trouble shooting.
  • A programmable horizontal cassette shuttle option allows wafer alignment to 300 mm standards and provides centerline positioning for adaptation to tool-side automation.
  • SEMI and CE compliance for low cost of ownership.
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