The Brooks VCE 6 Vacuum Cassette Elevator load lock enables safe, clean AGV, RGV, or human operator transfer of up to 200mm, SEMI standard wafer cassettes. It is available in three styles:

Cassette Buffer Load Station with Cassette Transfer Arm
Ergonomic Tilt Platform and Cassette Guide
Cassette Transfer Arm Platform
The VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing that suits your specific wafer fabrication environment. It is designed for ultra-clean and reliable operation with full environmental isolation ranging from 10-6 scale high vacuum to just above atmospheric pressure.

Brooks has earned a leadership position in vacuum transport systems by amassing unparalleled engineering capability and innovation across substrate transport and controlled environments that differentiate our best-in-class solutions. Our advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.

The Marathon™ Express is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications. Thanks to its modular architecture and the availability of 4, 6, 7, and 8 sided versions, the Marathon Express can be tailored to meet the varying needs of a wide range of process applications.

This high-performance vacuum transport system is well suited to PVD, CVD, Etch, MR Head Deposition, MEMS, as well as compound semiconductor applications.

et, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. The Brooks Jet family delivers the high-performance ultra-cleanliness and proven reliability that today’s semiconductor manufacturers expect and demand.

Take off with a revolutionary approach to semiconductor wafer handling.

The new Spartan™ 450mm development platform brings to market a unique, small footprint, low-cost system that allows original equipment manufacturers (OEMs) to reliably get wafers into and out of process chambers. This single FOUP EFEM accelerates OEMs 450mm development efforts by eliminating the need to spend engineering time on platform development. This highly scalable platform allows OEMs to easily migrate to high volume production, with no software and hardware interface changes.